Plasma Cleaner
Plasma is generated in vacuum by our original technology
Surface Reforming Device DTS-01
- NEPS/high frequency, microwave are not used
- Large-capacity batch type low-temperature dry machine
- Oxygen radical chemical reaction prevents the sample from being charged and allows it to be processed at room temperature
- Improves wettability and hydrophilicity before film formation and application
- It can be used widely as a test research and mass production equipment
| Model | DTS-01 |
|---|---|
| Control System | Sequencer Control |
| External Dimensions | W1000 x D1000 x H1540(mm) 400Kg |
| Chamber Material | Aluminum |
| Chamber Size | Internal Dimensions W600 x D620 x H250(mm) |
| React Gas | N₂ O₂ Ar Air |
| Vacuum Pump | Dry Pump 1000L/min 50/60Hz |
| Emergency Stop | Push Type |
| Power | 3Φ AC 200V±5% 50/60Hz 20A |