
X-eye SF160 Series
2D & 3D Micro CT System
- Non-destructive analysis of semiconductor, SMT, and electron/electric components
- Hybrid Tube Option (160kv/500㎛, 10,000hrs/filament)
- Dual CT – High-quality CT image / high speed scan
Best performance X-ray Inspection System
High-performance Micro-focus Open Tube with 160kV is installed and fine defects of 1㎛ are detectable.
High-resolution X-ray image can be gained with world best magnification by installing high-price Open Tube as standard.
Dual CT function can be purchased additionally, and exact location & size of defects can be detected and analyzed with this function.
| X-ray Tube | 160 kV / 200 µA (option 160 kV / 500 µA) | 
|---|---|
| Min. Resolution | 0.9 µm | 
| Table Size | 460 X 510 mm (option 550 X 650 mm) | 
| AXIS | X, Y, Z, Tilt (70º), R, Y-aft, Cone beam R | 
| Detector | 5 inch Pixel FPD | 
| CT Scan Method | Oblique CT / Cone beam CT | 
| Foot print | 1,340mm x 1,460mm x 1,670mm | 
| Weight | 2,000kg | 













